摘要
以金属钽层作为钛阳极的中间层可提高阳极的使用寿命,而热分解法制备涂层操作方便、工艺简单且成本低。考察了五氯化钽正丁醇溶液在氮气(≥99.99%)中的热分解过程,并以五氯化钽正丁醇溶液为先驱体,在氩气(≥99.99%)中采用涂覆烧结的热分解法在钛基体上制备了含钽涂层,考察了热分解温度、涂覆次数对涂层表面形貌、相结构和结合力的影响。结果表明:五氯化钽正丁醇溶液在300℃时已基本分解完全,热分解最终产物含钽、氧和少量残余的氯,采用高纯惰性气氛可减少钽的氧化;钛基上含钽涂层表面呈龟裂状;涂层的相结构受烧结温度和涂覆次数的影响,主要为Ta,TaO2或Ta,TaO2,Ta2O5;热分解温度对涂层结合力的影响较大,而涂层厚度对结合力的影响相对较小。
Thermal decomposition process of TaCl5-butanol solution in N2 atmosphere(≥99.99%) was studied.Coating containing tantalum was then prepared on titanium substrate by thermal decomposition of coated TaCl5butanol precursor in Ar atmosphere(≥99.99%).The effects of themal decomposition temperature and coating cycle on the morphology,phase composition and adhesion to substrate were investigated.It was found that TaCl5-butanol solution was nearly completely decomposed around 300℃,and the final products consisted of Ta,O and a small amount of residual Cl.The oxidation of Ta was retarded in highly pure inert atmosphere.Besides,the Ta coating on Ti substrate had crack-like appearance,and its phase composition was dependent on sintering temperature and cycles of coating,mainly consisting of Ta,Ta2O or Ta,Ta2 O,Ta2 O5.Moreover,thermal decomposition temperature had significant effect on the adhesion of coating,but the thickness of coating had relatively minor effect on the adhesion.
出处
《材料保护》
CAS
CSCD
北大核心
2011年第6期40-42,64,共4页
Materials Protection
关键词
热分解法
钽涂层
钛基体
五氯化钽
形貌
相结构
结合力
thermal decomposition method
tantalum coating
Ti substrate
TaCl5
morphology
phase composition
adhesion
