摘要
利用矢量衍射理论设计了适用于共焦显微等大数值孔径系统的三区二元相位型超分辨光瞳滤波器。数值模拟了等效数值孔径为1.4的共焦显微系统焦点附近的光强分布,根据系统所需要的斯特雷尔比和轴向分辨率,采用优化搜索算法求解了能够实现光学超分辨的三区二元相位型光瞳滤波器结构。结果表明,利用所设计的三区二元相位型光瞳滤波器可以在较低旁瓣能量的前提下实现共焦显微系统及其它大数值孔径系统的轴向超分辨率。
In order to improve the resolution of confocal scanning microscope system, three-zone annular binary pure phase filter is designed with the vector diffraction theory. When the high numerical aperture focused 1.4, the light intensity distribution near the focus is numerical simulated. Based on the Strehl ratio and axial resolution, the structures of the three-zone annular binary pure phase filter which achieved optical superresolution could obtained with the optimal search algorithm. The simulation results show that axial superresolution and low side-lobes can be realized with the designed three-zone annular binary phase filter in the confocal scanning microscope systems and other high numerical aperture system.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2011年第6期189-193,共5页
Acta Optica Sinica
基金
国家自然科学基金(10904080
10804060)
瞬态光学与光子技术国家重点实验室开放课题(SKLST201012)资助课题
关键词
共焦显微系统
光学超分辨
矢量衍射理论
相位型光瞳滤波器
confocal scanning microscope system
optical super-resolution
vector diffraction theory
phase pupil filter