2Beister, Gunther, Eckhard Dietrich, Christian Schaefer, et al. Progress in Large-area Glass Coating by High-rate Sputtering [J]. Surface and Coatings Technology, 1995, (76 -77) :776-785.
3Szczyrbowski, J, G. Braeuer, M. Ruske, et al. Temperable Low Emissivity Coating Based on Twin Magnetron Sputtered TiO2 and Si3N4 Layers[C] . Thin Solid Films, 1999, 351:141 -161.
4Navinsek, B, P. Panjan. Oxidation of CrNx Hard Coatings Reactively Sputtered at Low Temperature [ J ]. Thin Solid Film, 1993,223 :4 - 6.