摘要
针对电容传感器检测场较为复杂的特点,借助ANSYS软件对其进行三维静态模拟,分析了传感器结构参数对三维检测场的均匀性与灵敏度等指标的影响。通过有限元计算和优化设计,得到了最优的传感器结构参数,如屏蔽罩半径R3=27.37mm,极板长度L=207.39mm,极板旋转角度θp=270°,极板张角θ=135°等。优化后的传感器检测场均匀性误差SVP=2.794%。在试验室条件下对传感器进行试验。结果表明,经过优化设计的传感器其性能指标均优于未优化设计的传感器。
According to complex characteristics of the capacitance sensor test field,its 3-D static field were simulated by ANSYS software,effects of sensors structural parameters on 3-D test field homogeneity and sensitivity index were analyzed.Through the finite element calculation and optimization design,the optimal sensor structure parameters were derived,such as shields radius R3 = 27.37 mm,pole plate length L = 207.39 mm,pole plate rotation angle θp= 270°,pole plate flare angle θ=135°,and so on.The test field distribution uniformity error SVP of the optimized sensor is 2.794%.In the condition of the laboratory,the sensors were tested.Results show that performance indicators of the sensor optimized design are better than that of the sensor without optimized design.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2011年第7期42-46,共5页
Electronic Components And Materials
关键词
电容传感器
三维螺旋表面极板
静态分析
设计
capacitor sensor
three-dimensional helix surface pole plate
static analysis
design
