摘要
针对微火工品和微推进器集成化的发展需求,以及制作工艺与MEMS、半导体工艺相兼容并能实现低能发火的要求,对Ni-Cr薄膜换能元进行了研究,设计制作了几种不同桥区尺寸和薄膜厚度的Ni-Cr薄膜换能元,并对其电发火性能进行了测试。结果表明:在同一桥区尺寸的条件下,Ni-Cr薄膜发火感度随桥膜厚度的增加而升高;在相同的桥膜厚度下,Ni-Cr薄膜的发火感度随桥区尺寸的增大而降低。
In this paper, the firing performance of Ni-Cr thin film was studied in order to meet the don,ands of the integration of micro-initiation explosive devices and micro-thrusters, and the compatibility between fabricaton process and MEMS semiconductor techniques. The Ni-Cr films of various bridge size and thickness were designed and produced, and the firing tests were carried out. The results indicated that the firing sensitivity increased with the increase of thickness of Ni-Cr film when the bridge size was same, while the sensitivity decreased as the bridge size increasing when the thickness was same.
出处
《火工品》
CAS
CSCD
北大核心
2011年第2期4-6,共3页
Initiators & Pyrotechnics
基金
重点实验室基金(9140C370205090C37)
