摘要
介绍一种基于滑膜阻尼的差动电容加速度传感器.该加速度传感器利用圆柱形差分电容极板间重合面积的改变来检测加速度的大小,保证输出电压与加速度之间的线性度.对加速度传感器进行结构设计和分析,介绍加速度传感器的工艺流程.测试结果表明,该加速度传感器的灵敏度较好,谐振频率与理论计算相吻合.
An acceleration transducer with slide-film damping-based differential capacitor was introduced.In this transducer the acceleration was detected by the alteration of the overlapping area of a cylindrical differential capacitive plate pair and the linearity between the output voltage and acceleration was ensured.The structure of the acceleration transducer was designed and analyzed and its technological process was introduced,also.It was shown by measurement result that its sensitivity was fairly good and its measured resonant frequency was well consistent with that of theoretic calculation.
出处
《兰州理工大学学报》
CAS
北大核心
2011年第3期43-46,共4页
Journal of Lanzhou University of Technology
关键词
电容式加速度传感器
差动电容
结构设计
工艺流程
滑膜阻尼
capacitive acceleration transducer
differential capacitance
structural design
technological process
slide-film damping
