摘要
以WF6、H2为原料,采用化学气相沉积法沉积制备出不同直径难熔金属钨管。对不同沉积温度(500℃,600℃,700℃)沉积制备钨管的纯度、密度、显微硬度、残余应力及钨管强度进行了测试与分析研究。研究结果表明:沉积制备钨管具有高纯度和高致密度;随着沉积温度、钨管半径(3～20 mm)不同,显微硬度值在500～800 HV之间;沿钨管圆周、半径方向存在较大残余应力;抗拉强度范围在300～500 MPa.
Refractory metal tungsten tubes of different diameter have been prepared successfully by chemical vapor deposition with the mixture of WF6 and H2.The purity,density,micro-hardness,residual stress and strength of tungsten tubes at different deposition temperatures（500℃,600℃,700℃） were tested and analyzed.The results show that tungsten tubes prepared in this way demonstrate high purity and high density.At different deposition temperatures,micro-hardness values of tungsten tube of different radius（3-20mm） change between 500 and 800HV.A relatively high residual stress exists along the tungsten tube circumference,radius of the direction.And the tensile strength range is 300-500MPa.
出处
《兵工学报》
EI
CAS
CSCD
北大核心
2011年第6期703-706,共4页
Acta Armamentarii
关键词
金属材料
化学气相沉积
钨
组织
性能
metallic material
CVD
tungsten
microstructure
performance
