摘要
为实现用小口径面形干涉仪完成对大口径光学镜面面形的检测,发展了斜入射检测方法,增大投射到待测镜上光斑的尺寸,从而增大干涉仪检测的镜面口径范围。推导了斜入射法检测平面反射镜面形的公式,并考虑了此方法可能引入的误差。对尺寸为124 mm×42 mm的平面反射镜分别在垂直和不同斜入射角条件下进行了测量,垂直入射时测得镜子工作表面面形起伏高度均方根(RMS)和峰谷(PV)值分别为16.3 nm和67.8 nm,斜入射时测得镜子工作表面的面形起伏高度RMS和PV值分别为16.8 nm和68.7 nm,相对误差分别为3%和0.9%,可以满足第三代同步辐射光束线的要求。
In order to measure the surface shape of large aperture plane mirrors by using smaller caliber laser interferometer, oblique incidence method is developed. Thus, the spot illuminated on the tested mirror is magnified, and the size range that the interferometer can measure is much bigger. The plane mirror surface shape expression based on oblique incidence is gained, and the errors that may be introduced are concerned. And a plane mirror with size of 124 mmX42 mm is measured using vertical incidence and oblique incidence with different incidence angles. The surface height root mean square （RMS） and peak-to-valley （PV） results of the test mirror are 16.3 nm and 6？. 8 nm based on vertical incidence and 16.8 nm and 68.7 nm based on oblique incidence. Compared with vertical incidence measurement results, the relative error value of RMS is 3 %, and the relative error value of PV is 0.9 %. The result can satisfy the requirement of the third generation synchrotron radiation beam lines.
出处
《激光与光电子学进展》
CSCD
北大核心
2011年第7期85-90,共6页
Laser & Optoelectronics Progress
关键词
测量
镜面面形
斜入射法
ZYGO干涉仪
斜率误差
measurement
surface shape of mirror
oblique incidence
ZYGO interferometer
slope error
