摘要
追踪分析世界上表面微观形貌检测方面显微干涉检测原理的最新进展 ,比较干涉显微镜用于检测表面微观形貌时具有的形式、结构特点 ,分析选型研制干涉显微镜可能遇到的问题及应该研究的方面。
It is given about new advances in measurement fundamental with interferometric microscopes for surface microtopography in this paper.The virtues and defects are compared with for different type of interferometric microscopes with different configuration.Problems and tendency for future research and development of interferometric microsopes are discussed.
出处
《光学仪器》
1999年第6期36-42,共7页
Optical Instruments
基金
南京理工大学发展基金资助
关键词
干涉显微镜
干涉检验
微观形貌
Interferometric microscope,interferometry test,microtopography.
