摘要
利用射频磁控溅射法结合后退火工艺在LaAlO3(100)衬底上制备了La0.4Nd0.1Sr0.5MnO3(LNSMO)一系列薄膜样品。通过X射线衍射仪(XRD)、原子力显微镜(AFM)、光电子能谱(XPS)、四探针法对其结构及性质进行了测试。结果表明,薄膜在700～900℃温度区间退火形成单相的赝立方钙钛矿结构。退火温度不同导致薄膜中氧含量发生变化并且对晶粒的尺寸也有很大影响。经过850℃退火的薄膜样品,在室温300 K,磁场为1.5 T的条件下,磁电阻达到24.9%。
By the method of RF magnetron sputtering and annealing at different temperatures,a series of La0.4Nd0.1Sr0.5MnO3（LNSMO）films were grown on（100） LaAlO3 single crystal substrates.The thin film was characterized by X-ray diffraction（XRD）,atomic force microscope（AFM）,X-ray Photoelectron spectroscopy（XPS） and four probe method.The results showed the LNSMO films annealed at temperature range of 700～900 ℃ had a single-phase with a pseudo-cubic perovskite structure.The different annealing temperature led to changing of oxygen content and crystal grain size in the thin film.The magneto-resistance of the thin film,which was annealed at 850 ℃,arrived at about 24.9% when the temperature was at 300 K and the magnetic field was at 1.5 T.
出处
《中国稀土学报》
CAS
CSCD
北大核心
2011年第4期411-416,共6页
Journal of the Chinese Society of Rare Earths
基金
国家自然科学基金资助项目(60561001)
关键词
薄膜
退火
结构
磁电阻
XPS谱
稀土
thin film
annealing
structure
magneto-resistance
XPS spectra
rare earths
