摘要
设计了一种基于压电陶瓷的三维微定位系统,通过12个空间分布的压电陶瓷微驱动器及4个工作平台的配合,实现X、Y、Z向的精密位姿控制。阐述了微定位原理、建立了载物台位姿与压电陶瓷微驱动器伸缩量之间的关系,介绍了系统误差来源以及微定位装置的构造。该研究可望为一些高科技领域的微进给提供实用新技术。
A micro positioning system based on piezoelectric ceramics is proposed,which can realize x,y,z DOF precision positioning by 12 PZT actuators and 4 worktables.The micro positioning principle is given,and the relationship between the position of platforms and the displacement of PZT actuators are shown,and the error source,and the conformation of the device are introduced.It provides practical new technique for high-tech field such as micro feed motion.
出处
《国外电子测量技术》
2011年第7期31-33,共3页
Foreign Electronic Measurement Technology
基金
国家自然科学基金(69785007)资助项目
关键词
压电陶瓷
空间定位
微位移
piezoelectric ceramic
space positioning
micro movement
