摘要
容栅千分传感器广泛应用于位移测量中,设计的容栅千分传感器,将普通容栅传感器在线路板上的刻线划分移植到了半导体硅片上,利用了半导体的工艺技术,实现刻线划分的高精度、高密度,从而达到普通线路板无法达到的精度,将容栅传感器的分辨力提高至0.001mm。
Capacitive millesimal sensor are widely used in displacement measurement.The designed capacitive millesimal sensor has a characteristic that transplants the reticle from circuit boards to semiconductor silicon wafers.Techniques of semiconducters are used to realize higher precision and higher density that usual circuit boards can＇t reach.The resolution of capacitive millesimal sensor can reach 0.001mm.
出处
《传感器与微系统》
CSCD
北大核心
2011年第8期95-96,103,共3页
Transducer and Microsystem Technologies
关键词
容栅
千分传感器
半导体硅片
capacitive grating
millesimal sensor
semiconductor silicon wafers
