摘要
介绍了一套基于CCD工艺的模型参数提取用测试图形(Testchip)设计方法。该Testchip的设计充分考虑了CCD工艺特征、中测测试条件、CCD放大器特性等各种关键因素,并在对应的工艺线进行流片,得到了完整的测试数据。
A design method of process is presented. In this method, technology and CCD on-chip amplifier corresponding processing line, and full testchip for model parameter extraction based on CCD factors such as test conditions, and characters of CCD are considered. Finally, test chips are fabricated in the testing data about the chips are acquired.
出处
《半导体光电》
CAS
CSCD
北大核心
2011年第4期492-494,572,共4页
Semiconductor Optoelectronics
