摘要
针对光刻机工作台多维纳米级同步运动,提出一种基于光纤链路的同步测控机制,实现了针对各运动轴控制指令执行和传感数据采集的严格同步;为每个运动控制器与其测控单元之间设计了独占的高速数据通道,确保测控的实时性;设计了基于内部总线的同步周期触发,定义了一致的传感器、执行器单元执行时序,以及精确光纤链路数据传输模型,确保测控的高同步性。实验结果表明,该测控机制的总体输出延迟小于0.65μs,同步误差小于20ns,若提高光纤链路速率,能进一步提升同步测控性能。
Towards the requirements of nanometer-scaled synchronous motion of stages in lithography device,this paper proposed a synchronous measurement and control mechanism based on fiber channel link to realize strict synchronization of control instructions execution and sensor sampling towards different axes.Dedicated high-speed data transmission channel between each motion controller and relevant measurement and control unit was designed to ensure the real-time control performance.Design of synchronous cycle trig based on internal bus,consensus definition of sensor sampling and actuator timing and precise data transmission model ensured the synchronization performance.Experimental results show that overall outputs delay is less than 0.65μs with synchronization error less than 20ns.Performance of measurement and control mechanism can be improved by improving the fiber channel transmission rate.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2011年第19期2325-2330,共6页
China Mechanical Engineering
基金
国家科技重大专项(2009ZX02308)
关键词
光纤链路
同步
超精密
测控
fiber channel link
synchronization
ultra-precision
measurement and control
