摘要
基于紫外固化胶和聚砜聚合物材料体系,采用脊形单模波导结构,理论设计并优化了聚合物波导环形谐振腔滤波器的波导截面参数、弯曲半径和耦合区波导间距等结构参数,分析了其滤波响应特性。并在此基础上,结合光刻、反应离子刻蚀等传统的微加工工艺制备了聚合物环形谐振腔滤波器,并进行了光谱测试,器件测试结果与设计基本符合。结果表明,该聚合物微环谐振腔滤波器在通信波段1550nm附近的自由光谱范围为0.21nm,3dB带宽为0.04nm,插入损耗为26dB,消光比达到了11dB,品质因子达到了3.87×104。该聚合物微环谐振腔滤波器可以用于光通信及光传感集成芯片。
Based on the ultraviolet resist （ZPU） and polysulfone polymer materials, the structure parameters of the polymer ring resonator such as waveguide cross section, bending radius, waveguide gap in the coupling region are designed and optimized, and the filtering characteristic is analyzed. The polymer micro-ring resonator is fabricated using the traditional micro-fabrication techniques including contact lithography and reactive iron etching. The experimental results agree well with the simulation results. Results show that around the telecom wavelength of 1550 nm, the free spectral range, 3 dB bandwidth, insertion loss, extinction ratio and quality factor of the polymer micro-ring resonator are 0.21 nm, 0.04 rim, 26 dB, 11 dB, 3.87 × 10^4 , respectively. The polymer micro-ring resonator is very useful for telecom and integrated sensor chips.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2011年第10期122-126,共5页
Acta Optica Sinica
关键词
光学器件
聚合物
微环谐振腔
品质因子
消光比
optical devices
Dolvmer
micro-ring resonator
aualitv factor
extinction ratio
