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液相自组装制备钛酸铋功能陶瓷薄膜的工艺研究

Fabrication of Bi_4Ti_3O_(12) Functional Ceramic Film by Self-assembled Monolayers Technique
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摘要 以硝酸铋和氟钛酸铵为原料,以三氯十八烷基硅烷(OTS)为模板,利用自组装单层膜(SAM)技术,在玻璃基片上制备钛酸铋薄膜。改性基板的亲水性测定与原子力显微镜(AFM)测试表明,紫外光照射使基板由疏水转变为亲水,能够对OTS-SAM起到修饰作用。借助XRD,SEM测试手段分析了前驱液的pH值、沉积条件和煅烧温度对Bi4Ti3O12薄膜的物相组成、显微结构和表面形貌的影响,结果表明:前驱液pH值为1.30,60℃条件下沉积6h,有利于薄膜的生长,所得薄膜均匀致密;600℃为最佳煅烧温度。 Bi4Ti3O12 film was prepared on the glass substrate by the self-assembled monolayer(SAM) technique with Bi(NO3)3 and(NH4)2TiF6 as the raw material and octadecyltrichlorosilane(OTS) as the template.Hydrophilic characteristic measure of glass wafers and photographs of atomic force microscopy(AFM) indicate that the hydrophobe substrate changes into hydrophile by UV irradiation,and a modification of OTS-SAM is realized by UV light.Effects of pH values,deposition conditions and calcining temperatures on the phase composition,the microstructure and surface morphology of Bi4Ti3O12 film were analyzed by XRD and SEM.The results show that the Bi4Ti3O12 film is prepared by the self-assembled monolayer technique,and the films are uniform and dense with precursor pH value of 1.30,deposition condition of 60℃ for 6h.The suitable calcining temperature for Bi4Ti3O12 film is 600℃.
出处 《材料工程》 EI CAS CSCD 北大核心 2011年第9期14-19,共6页 Journal of Materials Engineering
基金 国家青年科学基金项目(51002092) 陕西省自然科学基金项目(2010JM6013) 陕西科技大学自选项目(zx08-11)
关键词 自组装单层膜 钛酸铋 薄膜 工艺 self-assembled monolayer Bi4Ti3O12 thin film fabrication
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