摘要
根据光学系统的波像差理论和干涉检测原理,分析了干涉仪系统的成像畸变对测量结果的影响,提出了对干涉仪系统的成像畸变进行标定和校正的方法。重点讨论了被测面的摆放存在倾斜和离焦两种情况下产生的测量误差,并提出了误差校正方法。实验中对同一个被测面进行多次测量,结果显示,干涉图样为3个条纹时的面形测量结果为30.96nm PV,6.32nm RMS,10个条纹时的面形测量结果为41.25nm PV,8.22nm RMS。校正后两次测量的PV值差降低到1.42nm,RMS值差为0.4nm。实验结果表明:提出的畸变校正方法可以有效地降低测量误差,提高测量结果的复现性,为高精度面形测量提供参考。
Based on the wavefront aberration theory and interferometric theory,the influences of imaging distortion in an interferometer on measuring results are analyzed and calibration and correction methods for the imaging distortion are proposed.The measurement errors caused by misalignments of the test surface（tip/tilt and disfocus） are discussed mainly.An experiment is carried out to measure the same surface under different number of fringes.The test results show that the surface shapes are 30.96 nm PV and 6.32 nm RMS for 3 fringes,and 41.25 nm PV and 8.22 nm RMS for 10 fringes,respectively.After the calibration,the difference of the results are declined to 1.42 nm PV and 0.4 nm RMS.The experiment proves that the calibration solution referred in this paper can improve the measurement accuracy.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2011年第10期2349-2354,共6页
Optics and Precision Engineering
基金
国家自然科学基金资助项目(No.40974110)
关键词
干涉检测
成像畸变
测量精度
误差校正
interferometric measurement
image distortion
measurement accuracy
measuring error calibration
