摘要
在刀具上沉积类金刚石(DLC)薄膜的关键技术问题是如何提高DLC薄膜的附着力,以发挥DLC薄膜在刀具涂层领域的优势。本文通过对微型钻头表面进行不同的化学预处理后利用射频等离子体化学气相沉法沉积DLC薄膜,对影响膜基附着力的内在规律进行了探讨。结果表明:采用简单酸碱腐蚀(先后使用NaOH溶液和HNO3溶液进行腐蚀)对DLC薄膜附着力的提高有一定作用,而综合腐蚀(首先使用酸碱腐蚀,然后使用Murakami试剂腐蚀)的效果更佳;此外,使用Murakami试剂腐蚀时间过长(超过6 min)会影响钻头本体的机械强度。实验结果对于DLC薄膜作为微型钻头涂层的应用具有很好的指导意义。
In order to apply the unique properties of diamond-like carbon（DLC） film in the cutting tool field,the key technical problem is how to enhance the adhesion of DLC films on cutting tools.In this work,the influence of different chemical pretreatments on the film adhesion was studied.DLC films were deposited by radio frequency enhanced chemical vapor deposition（RFCVD） method on micro drill.Results show that traditional acid corrosion is good for the adhesion,and the addition of Murakami reagents corrosion has better effects.Further more,the time of corrosion by Murakami reagents should be controlled less than 6 minutes,otherwise the mechanical strength of the micro drill will be reduced.The whole research provides good guidance for the application of DLC films in the micro drill coating field.
出处
《硬质合金》
CAS
北大核心
2011年第5期300-304,共5页
Cemented Carbides
