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TEM and TEM-EDX Analysis of Cross-section of TiO_2Thin Film and Glass Substrate

TEM and TEM-EDX Analysis of Cross-section of TiO_2Thin Film and Glass Substrate
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摘要 TiO2 thin film was deposited on Na-Ca-Si glass substrate by sol-gel process. TEM observation showed that the film is compactly joined to the substrate. TEM-EDX analyses of the film, film-substrate interface, and substrate revealed that the diffusion of Na+ from the substrate to the film is negative diffusion. TiO2 thin film was deposited on Na-Ca-Si glass substrate by sol-gel process. TEM observation showed that the film is compactly joined to the substrate. TEM-EDX analyses of the film, film-substrate interface, and substrate revealed that the diffusion of Na+ from the substrate to the film is negative diffusion.
出处 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 1997年第2期55-56,共2页 矿物冶金与材料学报(英文版)
关键词 thin film SOL-GEL TITANIA diffusion thin film, sol-gel, titania, diffusion
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