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An improved Monte Carlo method of low-energy electron scattering in solids

An improved Monte Carlo method of low-energy electron scattering in solids
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摘要 The studies on the theories and calculation method of low-energy electron scattering(LEES) in solids have provided a basis for the development of electron microscopy andelectron beam lithography. In the energy region where the primary energy of incident elec-
出处 《Chinese Science Bulletin》 SCIE EI CAS 1996年第9期783-788,共6页
基金 National Natural Science Foundation of China.
关键词 LOW-ENERGY ELECTRON SCATTERING MONTE Carlo method INELASTIC scattering. low-energy electron scattering Monte Carlo method inelastic scattering
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