摘要
纳米计量和纳米定位是纳米技术的基础，是通向原子尺技术的关键。本文概述了纳米计量和定位技术的现状，分析了具有代表性的计量及定位方法及其特点，指出了它们未来的发展趋势。
Recently,a break through of maching precision from submicrometer tonanometer was made in science and engineering areas,In order that the new products of thefuther will be built by arranging atoms one by one in the way we want,the new instrumentswhich have near atomic resolution are needed.So first we must generate the ultra precisionmetrology necessary to see and measure at the atomic scale. Second we must design and buildmechanisms to accurately position rnacroscopic or microscopic tools on this scale. In this pa-per,the present conditions of nanometrology and nanopositioning technology are brief intro-duced,the representive method of ultra precision metrology and positioning are analized andtheir trends of development are pointed out.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
1995年第S1期47-50,共4页
Chinese Journal of Scientific Instrument
