摘要
对平面结构和镶嵌结构界面金刚石涂层的界面结构特点、受弯曲应力应变时的失效方式进行了分析,指出镶嵌结构界面金刚石涂层是提高膜/基体结合力的有效方法;综述了镶嵌结构界面金刚石涂层的国内外研究现状,并指出了今后镶嵌结构界面金刚石涂层的发展方向。
The latest progress in the fields of synthesis of the plane and inlay structured diamond coatings,the adhesion strength and microstructures at the interface of the coating and substrate,and the mechanisms responsible for cracking and failures under bending stress was tentatively reviewed in a thought-provoking way.The discussions centered on the state-of-the-art synthesis technologies of the inlay structured diamond coatings,the intensively studied subjects of basic interest,and the development trends.The preliminary results show that the inlay structured interlayer significantly enhances the adhesion strength at the interface of the inlay structured diamond coatings and the substrate.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2011年第6期691-695,共5页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金资助项目(51071070)
关键词
金刚石
镶嵌
化学气相沉积
结合力
研究进展
Diamond
Inlay structure
Chemical vapor deposition
Adhesive strength
Development tendency
