摘要
测头系统作为精密量仪的关键部件,其精度高低直接影响量仪的测试性能,因此一直受到精密测量领域的关注。目前,广泛使用的三叉式触发测头,在结构上存在各向异性、测杆变形等带来的误差问题,制约了精度的提高。为此,提出一种新型的球内反射式光纤测头,充分利用了接触式测量和非接触式测量的优点,采用特殊的光纤球内反射结构,并运用计算机图像技术进行信息处理。通过原理的探索、实验样机的研制以及试验验证,该球内反射式光纤测头原理完全可行,在一维微位移平台上实验得到测头的测量位移量阈值小于0.1μm,单向重复性精度达到0.044 9μm。
Probe system is the key part of precision measuring instrument, its precision level effects test performance directly, so it draws wide concern in accurate measurement field. At present, tripod touch trigger probe is used widely, but its structure has some error problems that are caused by bend distortion of probe staff, anisotropy and etc; these problems always influence its precision level. To solve these problems, this paper develops a novel inner- sphere reflecting fiber probe, which makes fully use of the strong points of both contact measurement and noncontact measurement, and uses computer image technology to process information. Through theoretical research, experimen- tal prototype manufacturing and verification test, results proves that the principle of this novel inner-sphere reflecting fiber trigger probe is feasible. Various performance tests have been performed using a one-dimensional platform, the measurement resolution of the tip ball displacement is less than 0.1 μm, and the precision of single direction repeat-ability is 0. 044 9μm.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2011年第12期2740-2746,共7页
Chinese Journal of Scientific Instrument
基金
国家自然科学基金(50627501)
北京市优秀人才培养项目(PYZZ090421001682)资助
关键词
光纤测头
接触式测量
球内反射
图像处理技术
fiber probe
contact measurement
inner-sphere reflecting
image processing technology
