摘要
研究了基于原子力显微镜(AFM)的微桥机械特性的测量方法。通过微机电系统(MEMS)技术制备了可用静电力驱动进行机械振动的金属微桥。利用一套改进的商用AFM实验装置对测量方法进行了优化,并对微桥的共振频率进行了测量,所得实验结果与理论估算和仿真计算的结果基本一致。基于AFM的微桥机械特性的测量具有精度高和容易实现的特点,可作为测量平台扩展用于薄膜材料或微量液体的内耗、粘弹等性质的表征。
The measurement method of mechanical characteristics of microbridge based on atomic force microscopy （AFM） was researched. Using micro-electro-mechanical systems （MEMS） technique, a metal microbridge was prepared which can be driven by electrostatic force. Based on eommerical AFM, an apparatus for the measurement of mechanical vibration of mierobridge was developed with its experimental method optimized. Then mechnical resonance of the microbridge was detected with the reconstructed AFM. Experimental results is consistent with that by theoretical analysis and the simulation results from COMSOL. The measurement method of microbridge mechanical charaiteristics based on AFM has the advantages such as high precision and easy-implemented. It＇ s also possible to further extend to test the inter-friction and viscoelasticity of films or micro-liquid.
出处
《半导体技术》
CAS
CSCD
北大核心
2012年第1期68-73,共6页
Semiconductor Technology
基金
广东省教育部产学研合作项目(2010B090400123)
关键词
原子力显微镜
共振频率
微机电系统
微桥
机械特性
atomic force microscopy （AFM）
resonance frequency
micro-electro-mechanical system （MEMS）
microbridge
mechanical characteristics
