摘要
研究了用于声表面波滤波器的微米尺度的叉指换能器的制作工艺。利用剥离工艺,分别采用铝和铬金两种金属制作了叉指换能器的电极,分析了剥离工艺制作叉指电极时的工艺特性。对加工样品的测量分析结果表明,利用剥离工艺制备的叉指换能器电极线条光滑、陡直、清晰,但是成品率较低。对比分析了采用铝和铬金制作的叉指换能器样品结构,结果表明两种金属材料在剥离液中的腐蚀时间不同,铝材料需要较长的剥离时间;两种材料制作的电极图形质量也有差异,铝材料制作的电极更为陡直、精细。
The fabrication process of the interdigital transducer（IDT） in micro scale for surface acoustic wave（SAW） filters was studied.Using the lift-off technology,the IDT electrodes were prepared with two kinds of metal materials including Al and Cr-Au,respectively.The process characteristic of the IDT fabricated by lift-off technology was analyzed.The test results of the processing samples indicate that the electrode lines of the IDT fabricated by the lift-off technology are smooth,steep and distinct,but the finished products rate is low.The sample structures of the IDT using Al and Cr-Au were compared.The results show that the corrosion time of the two kinds of metal materials in the lift-off liquid is different,the Al material need the longer time;the graphics quality of the electrodes fabricated with two kinds of metal materials is different,the electrode fabricated with the Al material is more steep and refined.
出处
《微纳电子技术》
CAS
北大核心
2012年第2期124-128,共5页
Micronanoelectronic Technology
基金
中国工程物理研究院科技发展基金重点课题(2010A0302013)
