摘要
针对非球面点衍射干涉检测中的欠采样问题,为了减小干涉条纹的密度,提出了一种基于最小反射会聚光斑半径求解最佳匹配球球心位置的方法.首先分析了获取最佳匹配球球心位置对实现非球面光学元件高准确度面形检测所起的重要作用,指出了以最小反射会聚光斑作为最佳匹配球球心位置的判断依据;然后运用光线追迹和迭代法推导了最佳匹配球球心位置的计算模型,并比较了各种非球面度定义下的最佳匹配球球心位置;最后分析了非球面参量对最佳匹配球球心位置及会聚光斑半径的影响.结果表明,基于最小会聚光斑半径求得的最佳匹配球面参量是适合非球面点衍射干涉检测模型的,并可以用于指导干涉仪的装调及后续波前重建参量的确定.
Aiming at the problem of undersampling in the aspheric surface point diffraction interference measurement,a method for solving the location of the center of the best fitting spheric surface is proposed,to reduce the interference fringes density.The method is based on the minimum reflex convergence spot radius.Firstly the important role that obtaining the location of the center of the best fitting spheric surface plays in the high-precision aspheric surface measurement is analyzed.And taking minimum reflex convergence spot as the criterion to judge the location of the center of the best fitting spheric surface is pointed out.Then the computing model for the location of the center of the best fitting spheric surface is derived with ray tracing and iterative.Also the locations of the center of the best fitting spheric surface based on different asphericity definitions are compared.And the effects of aspheric surface parameters to the locations of the center of the best fitting spheric surface and the convergence spot radius are analyzed.The results indicate that,the best fitting spheric surface parameters based on minimum convergence spot radius is suitable for the aspheric surface point diffraction interference measurement model,also can be used to guide the assembly and debugging of the interferometer and the selection of wavefront reconstruction parameters.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2011年第12期1865-1869,共5页
Acta Photonica Sinica
基金
陕西省自然科学基金(No.2010JM8012)资助
关键词
非球面
最佳匹配球
点衍射
光线追迹
Aspheric surface
Best fitting spheric surface
Point diffraction
Ray tracing
