摘要
利用DEM (Deepetching ,Electroforming ,Microreplication)技术获得的微复制金属模具进行了微复制工艺研究。对微复制工艺参数进行了优化 ,在PC、PMMA和POM塑料上获得了高深宽比的微结构 ,并对PC。
Microreplication process was studied by using a metallic mold insert fabricated by DEM ( Deepetching, Electroforming, Microreplication) technique. The process parameters of microreplication process were optimized. High aspect ratio microstructures of polycarbonate (PC), polymethyl methacrylate (PMMA) and polyoxymethylene(POM) were fabricated and Their qualities were investigated.
出处
《微细加工技术》
EI
2000年第1期61-65,共5页
Microfabrication Technology
基金
国家自然科学基金!(198750 6 0 )
上海市教委曙光计划资助项目
关键词
DEM技术
微复制
微结构
DEM technique
Microreplication
Microstructure.
