摘要
为了测量超长焦距高功率激光系统的波前畸变,研制并校准了基于空间相位调制的径向剪切干涉仪。仪器采用多波长设计,满足可见光和红外探测的需要。为研制并校准径向干涉仪,同哈特曼-夏克(HS)传感器、Zygo干涉仪进行了对比实验。通过实验与理论对比,得到径向剪切干涉仪参数的最佳值。研究了汉宁窗的取值范围和边缘截取值的合理范围,结果表明,校准后的径向剪切干涉仪能够准确测量,仪器的重复性和精度都能满足高精度波前探测要求。
To measure the wavefront of high-power laser with ultra-long focal length,we develop and calibrate a shearing interferometer based on spatial phase modulation.It is experimentally compared with Hartmann-Shack（HS） wavefront sensor and Zygo interferometer.The results show that the shearing interferometer can meet the requirements of precisely measuring wavefront.It has high precision and good repetitiveness.
出处
《激光与光电子学进展》
CSCD
北大核心
2012年第4期85-89,共5页
Laser & Optoelectronics Progress
关键词
光学测量
径向剪切干涉仪
实验研究
校准
optical measurement
radial-shearing interferometer
experimental study
calibration
