摘要
建立了包括电子、离子以及器壁发射二次电子的磁化等离子体鞘层流体模型,采用四阶龙格库塔法数值研究了伴有二次电子发射的磁鞘结构特性。模拟结果显示二次电子发射对于弱磁等离子体鞘层中的离子密度影响较大,而对于磁场较强的等离子体鞘层,鞘层中离子密度分布主要由磁场来决定。磁场的存在可以促进器壁电子的发射,磁场的增加或二次电子发射系数的增加都将使得鞘层厚度的减小,同时将导致沉积到器壁的离子动能流发生变化,从而直接影响器壁材料的性能。
The magnetized plasma sheath was modeled in fluid dynamics,with proper considerations given to the electrons,ions and secondary electron emitted form the wall.The impacts of the secondary electron emission（SEE） on the structure of the magnetized plasma sheath were simulated based on the forth-order-Rung-Kutta method.The simulated results show that the SEE significantly affects the weakly magnetized plasma sheath,and that the ion density distributions in the sheath of the strongly magnetized plasma depend on the magnetic field.Besides,the magnetic field results in an increase of the SEE.Interesting finding was that the width of the plasma sheath decreased with an increase of either the magnetic field or the coefficient of the SEE.Depending on the magnetic field and SEE,the bombardment of the impinging ions and electrons continuously damages the walls of the vacuum chamber.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2012年第4期279-284,共6页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金项目(10875024
10975026和11005025)资助项目
辽宁省教育厅高校科研基金资助项目(2009A047)
国家重点基础发展研究计划(2009GB105004和2009GB106002)资助项目
安徽省高等学校优秀青年人才基金资助项目(2012SQRL116)
关键词
等离子体
鞘层
二次电子发射
磁场
Plasma
Sheath
Secondary electron emission
Magnetic field
