摘要
介绍了磁控溅射的基本原理,以及几种典型的磁控溅射镀膜技术(反应溅射、非平衡磁控溅射、等离子体加强磁控溅射技术);并介绍了利用磁控溅射技术制备钛合金耐冲蚀涂层的新进展。
In this paper,the basic concept of magnetron sputtering method was reviewed and several typical magnetron sputtering technology such as reactive magnetron sputtering,unbalanced magnetron sputtering and plasma enhanced magnetron sputtering was described. Recent progress in research on erosion resistance titanium alloy composite coatings deposited by magnetron sputtering method was summarized.
出处
《黑龙江八一农垦大学学报》
2012年第2期16-19,26,共5页
journal of heilongjiang bayi agricultural university
基金
国家自然科学基金重点项目(50635030)
国家973计划前期研究专项(2007CB616913)资助
吉林大学研究生创新基金资助项目(20091015)
关键词
磁控溅射
耐冲蚀
钛合金
magnetron sputter
erosion resistance
titanium alloy
