摘要
根据大口径非球面光学元件的实际加工需要,设计并制造可控气囊抛光系统,并对机构进行运动学仿真,仿真结果表明,气囊自转轴的运动空间可以满足大口径非球面光学元件的连续进动加工要求。为了证明所设计系统的可加工性,以直径320mm的圆形平面光学元件进行加工实验。经过该气囊抛光工具24h的抛光后,工件达到较好的面型精度,光学元件的表面粗糙度由0.272λ减小到0.068λ(λ=632.8nm),PV值从1.671λ降低到0.905λ。对光学元件的实际加工实验结果表明:可控气囊抛光系统在加工过程中结构稳定性好,符合设计要求,可有效提高加工工件面型精度。
The paper presents the design and manufacture of controlled bonnet polishing system used for large aspheric lenses polishing.Kinematics simulations of the designed structure show that,the workspace of the spin axis of bonnet tool can meet the requirement of large aspheric lenses polishing with continuous precession processing.A polishing experiment on the circular flat workpiece with a radius of 320 mm has been carried out.The profile accuracy of the workpiece is fine after 24-hour polishing.The surface roughness reduces from 0.272λ to 0.068λ,and the peak-to-valley value reduces from 1.671λ to 0.905λ.The results of the experiment show that the controlled bonnet polishing system is featured with high precision and high stability,meeting the design requirements,and the system can improve the profile accuracy of workpieces effectively.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2012年第6期1344-1348,共5页
High Power Laser and Particle Beams
基金
国家自然科学基金项目(51075343)
福建省自然科学基金项目(2010J05122)
关键词
大口径非球面光学元件
进动抛光
可控气囊抛光系统
设计及研制
large aspheric lenses
precession finishing
controlled bonnet polishing system
design and manufacture
