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特种气体输送系统安全运行探讨 被引量:5

Discussion on the Safety Operation of the Specialty Gas Supply System
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摘要 论述了特气的性质及分类,对特气输送系统的主要构成单元:尾气处理器、特气气柜/气架、特气分配箱/分配盘、输送管线和特气监控/侦测系统的功能和用途进行了介绍,为避免特气输送系统出现泄漏,对特气系统日常安全运行管理和特气泄漏应急处理提出了建议。 Properties and classifications of the specialty gas, and the functions and purposes of the main components of specialty gas supply system were introduced, including scrubber, GC/GR, VMB/VMP, gas supply pipeline and GMS/ GDS. Some suggestions on daily safety operation management and emergency procedures were put forward to prevent spe- cialty gas leakage.
作者 杨敏杰
出处 《广州化工》 CAS 2012年第11期239-241,共3页 GuangZhou Chemical Industry
关键词 特气 输送 监控 管理 specialty gas supply monitoring management
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  • 1郑圣德.第五代TFT-LCD制屏工艺的最新进展[J].电子工艺技术,2005,26(1):52-54. 被引量:5
  • 2郑圣德.平板显示技术论坛TFT-LCD生产线的分类及组线设备[J].电子工艺技术,2005,26(6):365-369. 被引量:4
  • 3[美]OUIRK Michael,SERDA Julian.半导体制造技术[M].韩郑生,等,译.北京:电子工业出版社,2004.
  • 4汪光裕,凌安海.太阳能电池制作原理和实际应用[M].海口:三环出版社,2008.
  • 5SEMI F1-96 Specification for leak integrity of high-purity gas piping systems and components [ S ].
  • 6SEMI F106-0308 Test method for determination of leak integrity of gas delivery systems by helium leak detector [S].
  • 7SEMI F27-0997 Test method for moisture interaction and content of gas distribution systems and components by atmospheric pressure ionization mass spectrometry (apims) [S].
  • 8SEMI F35-0304 Test method for ultra-high purity gas distribution system integration verification using non-invasive oxygen measurement [S].
  • 9SEMI F70-0302 Test method for determination of particle contribution of gas delivery system [ S ].
  • 10QUIRKM SERDAJ 韩郑生译.半导体制造技术[M].北京:电子工业出版社,2004..

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