摘要
论述了特气的性质及分类,对特气输送系统的主要构成单元:尾气处理器、特气气柜/气架、特气分配箱/分配盘、输送管线和特气监控/侦测系统的功能和用途进行了介绍,为避免特气输送系统出现泄漏,对特气系统日常安全运行管理和特气泄漏应急处理提出了建议。
Properties and classifications of the specialty gas, and the functions and purposes of the main components of specialty gas supply system were introduced, including scrubber, GC/GR, VMB/VMP, gas supply pipeline and GMS/ GDS. Some suggestions on daily safety operation management and emergency procedures were put forward to prevent spe- cialty gas leakage.
出处
《广州化工》
CAS
2012年第11期239-241,共3页
GuangZhou Chemical Industry
关键词
特气
输送
监控
管理
specialty gas
supply
monitoring
management