摘要
介绍了计算相图的起因与发展 ,综述了利用 Gibbs生成自由能数据绘制简化的三元、四元相图的热力学方法 ,尤其是确定相图中直达连线的思想方法 ,最后给出了利用相图来解释金属化层稳定性和薄膜反应的应用实例。
The origin and development of calculated phase diagrams are introduced,and a thermodynamic method of constructing simplified ternary and quaternary phase diagrams using known data for Gibbs free energy of formation,especially the determination method of stable tie lines in a phase diagram is reviewed.In the end,examples of interpreting metallization layer stability and thin film reactions by phase diagrams are given.
出处
《半导体技术》
CAS
CSCD
北大核心
2000年第2期10-13,共4页
Semiconductor Technology
关键词
相图
金属化层
稳定性
薄膜反应
热力学
Phase diagram Metallization layer stability Thin film reaction Thermo dynamic approach
