摘要
MATLAB是当今先进计算软件之一,它提供的各类工具箱和内置函数给应用者带来了极大的方便。本文通过调用MATLAB中偏微分方程工具箱和插值函数实现了方管内表面等离子体离子注入的Particle-In-Cell模拟,并与传统其他语言程序的计算结果对比,结果基本一致。文章还讨论了不同尺寸的内电极对离子平均注入能量的影响,结果表明:即使有内部电极"钳位",平均注入能量也不高;在管壁偏压相同的情况下,尺寸较大的内电极因为"钳位"效果较好而具有较高的平均离子注入能量。最后提供了MATLAB对不规则形状靶件的计算结果,证明了MATLAB软件对不规则形状靶件的PIC模型有较好的适应性。MATLAB的应用为等离子体的模拟提供了简便易学的新途径。
The plasma ion implantation for irregular-shaped objects was simulated in particle-in-ceU （PIC） mode with the software package MATLAB. The interpolation functions and Partial Differential Equation （PDE） toolbox of MATLAB were used to realize the PIC simulation of plasma ion implantation inside a square tube. The impact of the inner- electrode＇s size on the average implantation energy was evaluated. The ＂clamp＂ effect of the inner wall strongly influences the field distribution inside the tube; and a larger area leads to a higher average implantation-energy. The simulated results show that biased at a fixed voltage,the strong ＂clamping＂ of the electrode with large surface area results in a fairly high average implantation-energy. The simulated results with MATLAB agree well with those calculated in other conventional methods. Besides,the initial sheath comqguration; on a rod with heart-shaped cross-section or inside a dovetail slot were also simulated.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2012年第6期487-492,共6页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金项目(10775036
10905013
10975041)
