摘要
解耦控制策略与控制参数校准技术是实现洛伦兹平面电机超精密运动控制的关键。在已有的动力学模型的基础上,采用基于模型逆变换的方法构建洛伦兹平面电机三自由度运动控制结构,实现解耦控制。为进一步提高解耦控制精度,对运动系统中的不确定因素进行分析,通过校准解耦控制参数补偿不确定因素对精度的影响。提出了基于实测数据的最小二乘算法,对解耦控制中的位置相关解耦矩阵进行校准,并改进已有校准算法,对力相关解耦矩阵进行动态验证。实测结果证明了所提方法的有效性与可行性,该方法已成功应用于工程实践。
The strategy of decoupling control and the calibration technology of control parameters are pivotal to realize ultra-precision motion control for Lorentz planar motors In this paper, a 3-DOF motion control structure was designed to implement decoupling control for Lorentz planar motors based on inverting the existing dynamic model. To improve control precision furthermore, the uncertainties in the control system were analyzed and the effect on control precision caused by the uncertainties was compensated through calibrating decoupling control parameters. A data-based least square algorithm was applied to calibrate the position relative decoupling matrix （PRDM） in the decoupling controller, and the force relative decoupling matrix （FRDM） was calibrated through improving the existing calibration algorithm. The effectiveness and feasibility of the proposed motion control structure and the calibration algorithm are demonstrated by experimental results and they are applied in engineering.
出处
《中国电机工程学报》
EI
CSCD
北大核心
2012年第21期112-118,共7页
Proceedings of the CSEE
基金
中央高校基本科研业务费资助项目(12MS06)~~
关键词
洛伦兹平面电机
解耦控制
参数校准
最小二乘算法
Lorentz planar motor
decoupling control
parameter calibration
least square algorithm
