摘要
介绍了d31 横向伸缩模式压电微位移驱动器的制作过程 ,应用高稳定的填满钨青铜型压电陶瓷作为该器件制备的基料 ,利用P -F干涉仪原理测量了电场 -位移特性曲线 ,由此计算了压电常数d31 ,并进行了讨论。该器件具有电控应变 (位移 )线性度高、滞后量小以及结构简单、制作工艺方便等特点 ,它在精密光学等技术领域有一定应用价值。
The preparation of lateral model (d 31 ) piezoelectric actuator was reported in this paper.A high-steady piezoelectric ceramic with tungsten bronze structure was used as the basic material of the actuator,and its piezoelectric induced displacement curve was measured by using the principle of F-P interferometer as well as the lateral piezoelectric constant (d 31 ). As discussed,this kind of actuator features high linearity and small hysteresis between induced displacement and applied electric field,meanwhile its structure is simple and easy to be fabricated.This actuator should have its applications in field of precise machinery.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2000年第B05期108-110,共3页
Journal of Functional Materials
关键词
压电陶瓷
微位移驱动器
逆压电效应
压电常数
piezoelectric ceramics
actuator
converse piezoelectric effect
piezoelectric constant
