摘要
在扼要描述了光学元件表面轮廓测量中功率谱密度（ＰＳＤ）函数的基本概念、公 式和应用基础上，重点讨论了光学元件表面低频和中高频空间频率ＰＳＤ对光场分布的影响， 并给出了强激光光学元件表面ＰＳＤ函数曲线的几个实测结果。
This paper describes the conception and the applications of the power spectral density function in optical surface profile measurement. It includes power spectral density(PSD) standard in ISO10ll0-8 and its origin, the connection between the light intensity disturbing and PSD function from the surface figure and surface finish. At last the PSD function of the high power laser optical elements is discussed.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2000年第4期392-396,共5页
High Power Laser and Particle Beams
基金
国家863惯性约束聚变领域资助课题!(L4162210)
