摘要
为了了解热驱动薄膜式微型泵的性能，对泵的主要部件进行了分析，然后对泵的整体性能进行了模拟。得到了微型泵的频率特性及流量随功率的变化。发现泵的流量在 ３．３ Ｈｚ左右达到最大。膜片的预应力对泵的性能有重要影响。功率小时，预应力使流量降低，功率大时，预应力使流量增加。泵的流量与输入功率的比值与输入功率的关系曲线有最大值，约在 １．２～１．８ Ｗ之间。实验测定了微型泵的频率和功率特性，模拟结果与实测结果基本吻合。
In this paper, three main parts of a thermal actuated membrane micropump are analyzed, then the micropump is simulated as whole. Simulating results of flow rate versus frequency and input power are obtained. It is found from simulation that the micropump has maximum flow rate at 3.3 Hz and the flow rate increase rapidly with input power when the input power is high because of the pre-stress. In addition, the ratio of flow rate to input power has maximum value when input power is in the range of 1.2~1.8 W. The flow rates versus frequency and input power have also been experimentally measured. It shows that the experimental and simulating results can match well.
出处
《工程热物理学报》
EI
CAS
CSCD
北大核心
2000年第2期201-205,共5页
Journal of Engineering Thermophysics
基金
国家自然科学基金!59995550-2
