摘要
高纯钨具有很高的附加价值,其市场前景与集成电路发展密切相关,高纯钨的净化是目前高纯钨生产中的重要研究课题。简要介绍了国内外高纯钨的生产现状、制备工艺及其纯度表征,在此基础上进行了展望。
High purity tungsten has very high added value,its market prospect and development is closely related to the development of integrated circuit,the purification of high purity tungsten is an important research topic in production of high purity tungsten at present.In this paper,the production situation of high purity tungsten,preparation technology,characterization of purity were reviewed.
出处
《粉末冶金技术》
CAS
CSCD
北大核心
2012年第3期223-228,共6页
Powder Metallurgy Technology
基金
国家自然科学基金资助项目(50774098)
关键词
高纯钨
微电子
钨靶
净化
精炼
high purity tungsten
microelectronics
tungsten target
purification
refining
