摘要
采用射频磁控溅射方法,分别在纯Ar和Ar,He混合气氛下制备了多个不同调制周期的Cu/W纳米多层膜.利用增强质子背散射(EPBS)、扫描电子显微镜(SEM)、X射线衍射(XRD)分别对Cu/W多层膜中He含量、截面形貌和相结构进行了分析.结果表明:多层膜的界面稳定性是耐氦损伤的前提和保证.在适当的调制周期下,纳米多层膜能有抑制氦泡成核及长大的能力.
In this paper, Cu/W nanomultilayers with different modulation periods are prepared in pure Ar and mixing atmosphere （He and Ar） by radio frequency magnetron sputtering method. The helium content, cross-section morphology and phase structure of Cu/W nanomultilayer are characterized by EPBS, SEM and XRD, repectively. The results show that the stable interface of the nanomultilayer is the prerequisite for resisting and the guarantee against the damage of helium. The nanomultilayer can suppress the growth of helium bubbles under the appropriate modulation.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
2012年第17期417-422,共6页
Acta Physica Sinica
基金
国家自然科学基金(批准号:51171124
50771069)
四川省科技支撑计划基金(批准号:2008FZ0002)
教育部新世纪人才基金(批准号:NCET-08-0380)
金属材料强度国家重点实验室开放基金(批准号:201011006)资助的课题~~
关键词
Cu/W
纳米多层膜
氦泡
界面稳定性
Cu/W, nanomultilayer, helium bubble, interface stability
