摘要
利用制作在P-DBRs表面的亚波长金属光栅,在980 nm高功率底发射垂直腔面发射激光器有源区引入各向异性增益,达到了偏振控制的目的。本光栅基于等效介质理论和抗反射理论设计而成,光栅周期为186 nm,占空比为0.5。通过多物理场有限元分析软件对所设计的光栅进行了模拟分析,结果基本上符合设计要求。通过优化工艺步骤得到了较好的实验结果,550μm孔径的VCSEL在正交方向上的偏振比为3,输出功率达到870 mW。
The polarization control of vertical-cavity surface-emitting lasers with high power emission was demonstrated by using metal-grating to import non-isotropic gain.The grating with a period of 186 nm and a duty ratio of 0.5 which were calculated based on effective medium theory and antireflection theory.Then,it was simulated by multiphysics field of finite element analysis software,and the results correspond well with our design requirements.A polarization ratio of 3,an output power of 870 mW was demonstrated for a 550 μm aperture device.
出处
《发光学报》
EI
CAS
CSCD
北大核心
2012年第9期1012-1017,共6页
Chinese Journal of Luminescence
基金
国家自然科学基金(11074247
61176045
51172225
61106068)资助项目
关键词
垂直腔面发射激光器
金属光栅
偏振控制
vertical-cavity surface-emitting laser； metal-grating； polarization controlling
