摘要
研究了Co/Pt多层膜中 ,Co层厚度 ,Co、Pt含量比 ,溅射温度对多层膜磁光性能的影响。研究发现Co层厚度及Co、Pt含量比对Co/Pt多层膜的磁光性能起决定性影响 ,当tCo<0 4nm ,tCo/tPt=1/2时 ,可获得较好的综合磁光性能 ;适当提高溅射时基体的温度 ,可改善多层膜的结晶性并获得较好的调制周期结构 。
The Magneto-optical(MO) properties of Co/Pt multilayers depend fundamentally on the periodic structures of the multilayers.In this paper,the influence of Co layer thickness,the atom proportion of Co and Pt,and the sputtering temperature on the MO properties of Co/Pt multilayers is studied.The research results proved that the MO properties of Co/Pt multilayers strongly depend on the Co layer thickness and the atom proportion of Co and Pt.When t Co <0 4nm,t Co /t Pt =1/2,the multilayers have a better synthetical MO properties;when the sputtering substrate temperature is raised up to a proper degree,the crystallinity of multilayers will be improved and better periodic structure will be obtained,which will finally improve the MO properties of Co/Pt multilayers.
出处
《贵金属》
CAS
CSCD
北大核心
2000年第2期10-14,共5页
Precious Metals
关键词
Co/Pt多层膜
调制结构
磁光性能
Co/Pt multilayers
Periodic structure
Megnito-optical property
