摘要
采用感光性聚酰亚胺和高粘附性聚酰亚胺双层刻蚀技术 ,在基片上制备了微马达线圈的定子绕组。该工艺不仅工艺简单 ,而且保留聚酰亚胺作为线圈的绝缘层,提高了微马达线圈的绝缘性能和耐热性能 ,使微马达的整体性能得到了提高。
This paper describes the fabrication process of a planar coil using photosensitive polyimde and high adhesive polyimide by twice etching method. This fabrication process is simple and can improve the output current of micro-motor for the rudimental polyimides as insulating layer. The as-fabricated micro-motor can directly drive a micro-gear with the diameter of 3.5nm. Its rotative speed can be controlled and can be reversible in direction. This micro-motor driven has successfully driven a prism with more weight and volume than itself.
出处
《功能材料与器件学报》
CAS
CSCD
2000年第2期111-114,共4页
Journal of Functional Materials and Devices
