摘要
本文根据对引进的国外 VPI设备所进行的调研、分析以及本人在国产 VPI设备设计中取得的成功经验 ,就 VPI设备设计中各系统的组成、设计中应注意的问题和各系统所具有的特点作了简述。
On the basis of research & study on the imported VPI equipment and the successful experience which is gotten from the domestic VPI equipment design, the composition of each subsystem, problems to be paid attention in design and their features are briefly introduced in this paper.
出处
《真空》
CAS
北大核心
2000年第4期36-39,共4页
Vacuum
