摘要
在三氯氢硅加氢还原生产多晶硅过程中,影响产品品质的因素有:三氯氢硅提纯、三氯氢硅加氢还原和外来杂质等。多晶硅分析要求精度高而分析方法中存在不足,建议从整个多晶硅生产工艺来分析和判断多晶硅杂质产生的原因。
In production of polycrystalline silicon by hydrogen reduction of trichlorosilane, the factors of influencing product quality included purification of trichlorosilane, hydrogen reduction of trichlorosilane, and foreign impurities. The analysis of polycrystalline silicon required high accuracy but there were shortcomings in the analysis method. It was suggested that the causes of impurities forming in polycrystalline silicon should be analyzed and judged from the whole production process of polycrystalline silicon.
出处
《氯碱工业》
CAS
2012年第9期31-33,共3页
Chlor-Alkali Industry
关键词
多晶硅
氢气
三氯氢硅
质量
影响因素
polycrystalline silicon
hydrogen gas
trichlorosilane
quality
influential factor
