摘要
在采用熔盐热析出反应在Si3N4陶瓷表面沉积钛金属膜的基础上,对CuAg合金在金属化表面的润湿性进行了研究,结果表明,CuAg合金能对采用该方法金属化的Si3N4陶瓷实现良好润湿.在此基础上,成功实现了钛金属化Si3N4陶瓷与Si3N4陶瓷的连接并对连接工艺进行了系统研究.连接界面的TEM研究发现,界面上广泛存在Ti-Cu-Si-N相并对这种相对连接强度的影响进行了讨论.
Based on the deposition of titanium films on Si3N4 surface by molten salt reactions,the wetting behavior of a liquid CuAg eutectic alloy on the titanium metallized Si3N4 was studied,it was found that, the metallized sample can be fully wetted by the eutectic alloy. Based on this result, the joining of metallized Si3N4 to Si3N4 waJs successfully obtained and the joining technique was systematically studied. TEM observation on the interfacial structure of the joints found that Ti-Cu-Si-N phases widely existed at the interface and their possible effects on the shear strength of the joints were also discussed.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
2000年第3期504-510,共7页
Journal of Inorganic Materials
基金
国家自然科学基金!59632090