摘要
以 Sn Cl4 液体为锡源用 MOPECVD方法制备出了 Sn O2 薄膜。用 X射线衍射仪和透射电镜(TEM)分析了薄膜的晶体结构和 Sn O2 晶体的颗粒度 ,优化出制备超微颗粒 Sn O2 薄膜的最佳工艺 ,并给此膜蒸发上电极 ,制成 Sn O2 气敏器件 ,测量其对乙醇的气敏特性 ,实验证明减小 Sn O2
The crystal structure and microstructure of SnO 2 thin film prepared with SnCl 4 liquid and O 2 by MOPECVD were analyzed with X ray diffraction and transmission electron microscopy , and the optimum engineering parameters of preparing SnO 2 films by MOPECVD were optimized. The gas sensing characters of SnO 2 thin films were measured and were improved by reducing SnO 2 grains.
出处
《西北大学学报（自然科学版）》
CAS
CSCD
北大核心
2000年第3期185-188,共4页
Journal of Northwest University（Natural Science Edition）
基金
陕西省自然科学基金资助项目!(96X13)
