摘要
为解决大型轴类零件圆度形状的高精度在线测量问题，研究了一种基于多电容传感、非接触式圆度形状测量系统，可现场测量直径达800mm的精密主轴。介绍了大直径精密回转工作台的主轴圆度形状测量方法，分析了多测头三点法的误差分离技术，详细阐述了精密电容传感器的测量原理和系统的结构及数据评价方法。与高精度的圆度形状测量仪比较的实验结果表明，该测量系统的示值误差优于0．1μm，重复性优于0．05μm，能够满足现场测量要求。
In order to realize the high precision roundness on-line measurement for large cylindrical shaft, a non- contact roundness measurement system based on multiple capacitance sensors is developed, which can measure the range of Ф800 mm. The roundness measurement methods for the shaft of large high-precision rotary tables are analyzed, especially the error separation technique by three-point method. The principle and structure of capacitance sensor are discussed, and the system composition and data evaluation methods are presented. Compared with a high precision roundness measurement equipment, the experimental result shows that the indication error is better than 0. 1 μm and repeatability is less than 0. 05 μm, which can satisfy the field measurement.
出处
《计量学报》
CSCD
北大核心
2012年第6期490-493,共4页
Acta Metrologica Sinica
基金
国家重大科技专项资助项目（2009ZX04011-042）
