摘要
介绍一种采用Nova公司的NPI系列隔离式传感器组件的TZ2 0 0系列扩散硅压力变送器的设计方法 .由于先进的膜片 /充油隔离技术可达到超强的承压能力与介质兼容的能力 ,而一种实用的信号处理电路又可做到大量程的调节 ,这就使该变送器具有宽广的量程和较高的抗腐蚀能力 .同时 ,用来进行温度补偿的电阻环路被制作在混合的陶瓷基片上 ,从而取代作为温度补偿用的外接电路 .通过在电力、化工、石油等领域的应用证明了上述特点 .
TZ200 series piezoresistance pressure transmitter using NPI series isosensor made in Nova company is introduced. Because of using chip/oil filled insulated technology and an actual signal process circuit may the transmitter has wide range and high resistance to erosion. And for compensation of temperature effect, a complete resistor network is supplied on a hybrid ceramic substrate instead of external compensation circuit. The feature mentioned above is demonstrated by applying in power, chemical,petroleum industry and so on.
出处
《沈阳化工学院学报》
2000年第2期107-110,共4页
Journal of Shenyang Institute of Chemical Technolgy