摘要
对单面分流四边形电极结构二维位置敏感探测器 (PSD)的场分布及输出电流进行了理论分析与计算 ,并按照该结构的位置公式计算得到了与实际结果基本一致的非线性和失真网格图 ,从而证实 :该结构PSD的非线性及失真主要来源于位置公式本身 ,改善这种结构PSD的非线性及失真的切实有效措施是寻找与理论计算结果尽可能一致又相对容易实现运算的位置公式。
The electric field distribution and current output of single side tetra-lateral two dimensional position sensitive detector (PSD) are analyzed and calculated theoretically.The nonlinearity and distortion grid map of the theoretical calculation using this structure's position formula are in good agreement with the experimental result.It is shown that the nonlinearity and distortion of this structure are mainly caused by the position formula.One of the effective ways to improve the nonlinearity and distortion of this 2-D PSD is to find out a position formula which accords with the theoretical result well and is easy to implement.
出处
《半导体光电》
CAS
CSCD
北大核心
2000年第4期269-271,275,共4页
Semiconductor Optoelectronics
基金
教育部重点科研项目
关键词
四边形电极结构
非线性
失真
位置敏感探测器
two dimensional position sensitive detector
tetra-lateral structures
nonlinearity
distortion